JPH0166009U - - Google Patents
Info
- Publication number
- JPH0166009U JPH0166009U JP1987161989U JP16198987U JPH0166009U JP H0166009 U JPH0166009 U JP H0166009U JP 1987161989 U JP1987161989 U JP 1987161989U JP 16198987 U JP16198987 U JP 16198987U JP H0166009 U JPH0166009 U JP H0166009U
- Authority
- JP
- Japan
- Prior art keywords
- links
- mirror
- movable table
- fringe scanning
- mirror surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 238000010008 shearing Methods 0.000 description 1
Landscapes
- Instruments For Measurement Of Length By Optical Means (AREA)
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161989U JPH0166009U (en]) | 1987-10-22 | 1987-10-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987161989U JPH0166009U (en]) | 1987-10-22 | 1987-10-22 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0166009U true JPH0166009U (en]) | 1989-04-27 |
Family
ID=31445410
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987161989U Pending JPH0166009U (en]) | 1987-10-22 | 1987-10-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0166009U (en]) |
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1987
- 1987-10-22 JP JP1987161989U patent/JPH0166009U/ja active Pending